TY  - BOOK
AU  - QUIRK,Michael
AU  - SERDA,Julian
TI  - Semiconductor manufacturing technology
SN  - 0130815209
PY  - 2001///
CY  - Upper Saddle River
PB  - Prentice Hall
KW  - Electronic industries
KW  - Semiconductors
KW  - Design and construction
N1  - Includes bibliographical references and index
ER  -